000 00571nam a2200241Ia 4500
008 240107s9999 xx 000 0 und d
020 _a0-201-14695-9
082 _a621.381 73 JAE
082 _bJAE
100 _aJAEGER RICHARD C
245 0 _aINTRODUCTION TO MICROELECTRONIC FABRICATION
245 0 _aINTRODUCTION TO MICROELECTRONIC FABRICATION
245 0 _nV
250 _n1st
260 _aMENLO PARK
260 _bADDISON-WESLEY
260 _c1988
300 _a232
365 _b2196
650 _aCOMMUNICATION
650 _bMICELE
942 _cREF
999 _c9214
_d9214