000 00664nam a2200253Ia 4500
008 240107s9999 xx 000 0 und d
020 _a1574446754
082 _a621.381 52 DOE
082 _bDOE
100 _aDOERING ROBERT EDITORS
245 0 _aHANDBOOK OF SEMICONDUCTOR MANUFACTURING TECHNOLOGY
245 0 _aHANDBOOK OF SEMICONDUCTOR MANUFACTURING TECHNOLOGY
250 _n2nd
260 _aBOCA RATON
260 _bCRE PRESS
260 _c2014
300 _a1500
365 _b6000
500 _aUNDER TEQIP PHASE - II
650 _aELECTRICAL
650 _bSEMICONDUCTOR MANUFACTURING TECHNOLOGY
700 _aNISHI YSHIO
942 _cREF
999 _c16287
_d16287