000 00477nam a2200229Ia 4500
008 240107s9999 xx 000 0 und d
020 _a9.78007E+12
082 _a621.3 HSU
082 _bHSU
100 _aHSU TAI-RAN
245 0 _aMEMS & MICROSYSTEMS
245 0 _aMEMS & MICROSYSTEMS
250 _n1st
260 _aNEW DELHI
260 _bTMH
260 _c2014
300 _a436
365 _b480
650 _aMECHANICAL
650 _bMEMS
942 _cREF
999 _c15883
_d15883