| 000 | 00480nam a2200229Ia 4500 | ||
|---|---|---|---|
| 008 | 240107s9999 xx 000 0 und d | ||
| 020 | _a9.78813E+12 | ||
| 082 | _a621.3 LIU | ||
| 082 | _bLIU | ||
| 100 | _aLIU CHANG | ||
| 245 | 0 | _aFOUNDATIONS OF MEMS | |
| 245 | 0 | _aFOUNDATIONS OF MEMS | |
| 250 | _n2nd | ||
| 260 | _aNEW DELHI | ||
| 260 | _bPPEARSON | ||
| 260 | _c2014 | ||
| 300 | _a576 | ||
| 365 | _b480 | ||
| 650 | _aMECHANICAL | ||
| 650 | _bMEMS | ||
| 942 | _cREF | ||
| 999 |
_c15882 _d15882 |
||