000 00534nam a2200241Ia 4500
008 240107s9999 xx 000 0 und d
020 _a978-81-322-0663-7
082 _a621.3 ADA
082 _bADA
100 _aADAMS THOMAS M
245 0 _aINTRODUCTORY MEMS
245 0 _aINTRODUCTORY MEMS
250 _n1st
260 _aNEW DE
260 _bSPRINGER
260 _c2014
300 _a444
365 _b795
500 _aUNDER TEQIP PHASE -II
650 _aMECHANICAL
650 _bMEMS FABRICATION
942 _cREF
999 _c15263
_d15263