000 00538nam a2200229Ia 4500
008 240107s9999 xx 000 0 und d
020 _a978-81-265-1790-9
082 _a621.381 73 GHA
082 _bGHA
100 _aGHANDHI SORAB K
245 0 _aVLSI FABRICATION PRINCIPLES
245 0 _aVLSI FABRICATION PRINCIPLES
250 _n2nd
260 _aNEW DELHI
260 _bWILEY
260 _c2009
300 _a835
365 _b479
650 _aINSTRUMENTATION
650 _bVLSI FABRICATION PRINCIPLES
942 _cREF
999 _c13057
_d13057