LIU CHANG <br/><br/>
FOUNDATIONS OF MEMS FOUNDATIONS OF MEMS 

 - 
 - NEW DELHI  PPEARSON  2014 
 - 576 
<br/><br/><label>ISBN: </label>9.78813E+12 
<br/><br/><label>Subjects--Topical Terms: </label><br/>MECHANICAL MEMS 
<br/><br/><label>Dewey Class. No.: </label>621.3 LIU  / LIU