TY  - BOOK
AU  - ADAMS THOMAS M
TI  - INTRODUCTORY MEMS
SN  - 978-81-322-0663-7
U1  - 621.3 ADA 
CY  - NEW DE
KW  - MECHANICAL
KW  - MEMS FABRICATION
N1  - UNDER TEQIP PHASE -II
ER  -